▶ Watch On-Demand | 1 Hr

On-Demand Session: Scanning Probe Microscopy and Nano-Indentation for Semiconductor Failure Analysis and Reliability

Learn how SPM and nanoindentation can enhance failure analysis and reliability testing in the semiconductor industry

Watch Individual Segments:

Atomic Force Microscopy for Semiconductor Failure Analysis and Reliability

Nano-Indentation for Semiconductor Failure Analysis and Reliability

Watch Now | 28 Minutes

Atomic Force Microscopy for Semiconductor Failure Analysis and Reliability

Presented by Peter De Wolf, Ph.D., Worldwide Application Director, Bruker (April 19, 2023)

_{PRESENTATION HIGHLIGHTS:}

[00:00:40] Surface Topography Imaging
[00:02:11] Mechanical Property Mapping feat. PeakForce QNM
[00:03:11] Chemical Identification of Nanoscale Elements Using Photothermal AFM-IR
[00:05:09] Temperature Mapping feat. Scanning Thermal Microscopy (SThM)
[00:06:20] Electrical Imaging & Spectroscopy

                    - [00:08:38] TUNA
  - [00:11:45] SSRM
  - [00:14:38] SCM
  - [00:19:50] SMIM
  - [00:24:28] EFM and KPFM

[00:25:45] Practical Considerations

Watch Now | 25 Minutes

Nano-Indentation for Semiconductor Failure Analysis and Reliability

Presented by Ude Hangen, Ph.D., NI Applications Manager, Bruker (April 19, 2023)

_{PRESENTATION HIGHLIGHTS:}

[00:00:00] Stresses, Strains and Material Strenght in Chip Processing
[00:02:51] Bruker's NanoIdenter Portfolio for the Semiconductor Industry

Part 1: Thin Film Properties and Adhesion Monitoring in Production

[00:04:28] Low-K and Ultra Low-K (ULK) Films

[00:07:14] What is Nanoindentation?
[00:08:58] NanoScratch Basics

Part 2: Next Node Semiconductor R&D

[00:10:18] The Advantages of Combining In-Situ SPM with High-Speed Mapping

[00:20:39] Overcoming Next Node Challenges
[00:23:14] Summary

MORE: NANOMECHANICAL TESTERS

Watch Now | 7 Minutes

Q&A

_{PRESENTATION HIGHLIGHTS:}

[00:00:00] How can you contrast the 2 techniques presented?

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