QUANTAX WDS

~ 4

eV

FWHM for Si-Kα

Superior energy resolution by over an order of magnitude

< 100

ppm

Detection limit for numerous elements

High trace element accuracy and precision

> 900

cps/nA

Count rate for C-Kα with an 80 Å multilayer

High sensitivity for low-energy X-rays

Complement Your SEM with the Benefits of an Electron Probe Micro Analyzer

The QUANTAX WDS (WDX) for SEM consists of the XSense wavelength dispersive spectrometer yielding the best resolution among all parallel-beam WDS systems. The large solid angle, due to the parallel-beam design, results in a much higher signal intensity for low-energy X-rays compared to a Rowland-circle based WDS spectrometer.

The high signal-to-noise ratios that are characteristic for WDS are further enhanced by a unique secondary optic that suppresses background artefacts.

Equipped with the finest grazing incidence optic and up to six analyzer crystals, the QUANTAX WDS has a superior sensitivity for low energy X-rays from 70 eV upwards.

An ingenious automatic optic alignment system and a unique pressure-controlled proportional counter ensure accurate and reproducible results.

Resolve common EDS peak overlaps such as Ta-W-Si, Pb-S, or Mo-S
Explore low-energy X-ray line series (L, M, N) for the elements of interest
Examine samples with low acceleration voltages to ensure a minimal depth of penetration
Obtain the highest cps/nA due to the high solid angle that enables light elements investigation from Be to F across the entire concentration range
Determine trace element concentrations far below the limits of detection of an EDS
Measure at low vacuum without the necessity of a conductive coating
Save time on analytical measurements with a unique pressure-controlled proportional counter
Ensure spatial accuracy of the spectral data for precise quantification
Save acquisition time with simultaneous WDS and EDS analysis that incorporates the benefits of each detector in the combined quantification