FilmTek SE
FilmTek SE
The base model of our "SE" product line, the FilmTek™ SE automated benchtop spectroscopic ellipsometer offers users a streamlined option for quickly and easily collecting highly precise, repeatable measurements on a range of thin and ultra-thin film samples.
The FilmTek SE is a benchtop spectroscopic ellipsometer for single point measurements and can be configured with a manual or automated xy stage. At the click of a button, thousands of wavelengths are simultaneously collected in seconds, and the integrated auto-focus feature eliminates the tedious task of manual sample alignment required by comparable ellipsometers. Our film modeling software and in-house dispersion formula allow for easy data processing, giving accurate and precise real-time results.
Measurement Capabilities
Enables simultaneous determination of:
- Multiple layer thicknesses
- Indices of refraction [ n(λ) ]
- Extinction (absorption) coefficients [ k(λ) ]
- Energy band gap [ Eg ]
System Components
Standard:
- Spectroscopic ellipsometry with rotating compensator design (390nm-950nm)
- Automated stage with autofocus
- Ideal for measuring ultra-thin films (0.03 Å repeatability on native oxide)
- Affordable for nearly any budget
- Advanced material modeling software
- Bruker's generalized material model with advanced global optimization algorithms
Typical Application Areas
Virtually all translucent films ranging in thickness from less than 100 Å to approximately 50 µm can be measured with high precision.
Flexible hardware and software can be easily modified to satisfy unique customer requirements, particularly in academic and R&D environments.
Typical application areas include:
- Semiconductor and dielectric materials
- Multilayer optical coatings
- Optical antireflection coatings
- Thin metals
- Solar cells
Technical Specifications
| Film Thickness Range | 0 Å to 50 µm |
|---|---|
| Film Thickness Accuracy | ±1.0 Å for NIST traceable standard oxide 100 Å to 1 µm |
| Spectral Range | 380 nm - 950 nm |
| Measurement Spot Size | 3 mm |
| Sample Size | 2 mm - 300 mm (150 mm standard) |
| Spectral Resolution | 0.3 nm |
| Light Source | Regulated halogen lamp (10,000 hrs lifetime) |
| Detector Type | 2048 pixel Sony linear CCD array |
| Computer | Multi-core processor with Windows™ 10 Operating System |
| Measurement Time | ~2 sec per site (e.g., oxide film) |
Performance Specifications
| Film(s) | Thickness | Measured Parameters | Precision (1σ) |
|---|---|---|---|
| Oxide / Si | 0 - 1000 Å | t | 0.03 Å |
| 1000 - 500,000 Å | t | 0.005% | |
| 1000 Å | t , n | 0.2 Å / 0.0001 | |
| 15,000 Å | t , n | 0.5 Å / 0.0001 | |
| 150.000 Å | t , n | 1.5 Å / 0.00001 | |
| Nitride / Si | 200 - 10,000 Å | t | 0.02% |
| 500 - 10,000 Å | t , n | 0.05% / 0.0005 | |
| Photoresist / Si | 200 - 10,000 Å | t | 0.02% |
| 500 - 10,000 Å | t , n | 0.05% / 0.0002 | |
| Polysilicon / Oxide / Si | 200 - 10,000 Å | t Poly , t Oxide | 0.2 Å / 0.1 Å |
| 500 - 10,000 Å | t Poly , t Oxide | 0.2 Å / 0.0005 |
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.