Delta-X
Delta-X
Delta-X 是布鲁克专为半导体薄膜分析而设计的最新一代 X 射线量测系统，适用于材料研究、工艺开发和质量控制等各阶段。该系统搭载了全自动化光源光学系统，能够在无需人工干预的情况下，切换标准 XRD、高分辨率 XRD（HRXRD）和 X 射线反射模式（XRR）。测量过程可以通过预设测量程序实现全自动化执行，同时支持在半手动模式下进行更复杂的测量。
300 mm晶圆全区域测量能力
Delta X专为满足多样化的薄膜分析需求而打造，支持高分辨率摇摆曲线（high resolution rocking curves）、倒易空间成像（reciprocal space mapping）、X射线反射率（XRR）、掠入射X射线衍射（GIXRD）、相位鉴定、残余应力评估（residual stress）、薄膜织构（film texture）与晶粒尺寸（grain size）分析等多种功能。
其配备的五轴欧拉样品台不仅能够进行完整的300mm晶圆扫描，还兼具处理大小不一样品的能力。针对小样品，机台有多个定位卡槽，可自动排队执行跨样品的多类型检测任务，无需人工干预，显著提升测试效率，有力推动研究进程。
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