InSight WLI
InSight WLI 搭载300mm晶圆处理系统
全自动的 InSight WLI 系统结合了卓越的光学表面测量功能与先进的晶圆处理系统，为用户提供前所未有的测量体验。该系统专为满足最为严苛的研发（R&D）、质量保证及工艺质量控制的需求而设计，搭载了专利性的探头倾斜设计（tip/tilt head）、独特的自校准激光参考（ self-calibrating laser reference）、集成图案识别功能（pattern recognition）以及其他众多布鲁克独有的干涉测量技术。相比于其他量测系统， InSight WLI在非接触精度、高通量能力和操作便捷性方面遥遥领先，它能够广泛应用于各种在线生产量测和成像任务中。选择 InSight WLI，助力您在竞争激烈的市场中保持领先地位。
准确性和稳定性的标杆
InSight WLI 在准确性和稳定性方面树立了新的行业标准，这得益于其多项创新技术：
- 独特的测量传感器设计与专利性的双LED光源设计。
自校准、专为优化量测的激光参考源。
集成有减震功能的地装式机柜。
Measurements & Analysis
快速简易的纳米级测量工具：
- 完全自动化的测量能力。
- 行业领先的纳米尺度特征测量精度。
强大的测量和分析能力：
- 精简且可定制的交互界面，特别适用于产线
- 灵活的配方设置和自动优化测量
- 丰富的滤镜库和可定制的分析项
满足产线严苛需求的配置
Configurations for Demanding Advanced Packaging
- Complete die flatness and CMP metrology solution
- TSV and interconnect measurements
- Hot-spot and defect detection on full reticle die
Factory Automation Ready
- SECS/GEM
- S2/S8 Compliant
- FDC, DCOL available
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.