Bruker
Продукты и решения Применения Услуги Новости и события О нас карьера
Пожалуйста, используйте как минимум 2 символа (в настоящее время вы используете 1 символ).

Languages

▶ Watch On-Demand | 50 Minutes

Accelerating Semiconductor Processes Control with Advanced 3D Optical Metrology

Learn how recent advances in 3D Optical Metrology accelerate in-line quality control for both front- and back-end processes
Presented by Samuel Lesko, Ph.D., Dir. of Technology and Apps Development, Bruker Nano Surfaces & Metrology (December 17, 2019)

       PRESENTATION HIGHLIGHTS:

  • [00:03:46] Review of non-contact interferometric profiler components, modes, and attributes
  • [00:16:15] Front-end (FEOL) quality control solutions for semiconductor manufacturing
  • [00:29:45] Back-end (BEOL) quality control solutions for semiconductor manufacturing


       LIVE AUDIENCE Q&A:

  • [00:46:43] What lateral resolution can you expect when scanning RDL layers?
  • [00:47:53] What is the layer thickness limit for characterization of transparent layers?
  • [00:49:06] How do you cope with different refractive indexes or oxide thicknesses for CMP measurements of films? 

Featured Products and Technology

Related Webinars

Fully automated defect inspection of advanced optical components.
On-Demand Session • 55 Minutes

Solving Challenges in Defect Inspection of Advanced Optics

Gain new insight into the inspection process for advanced optical materials, including strategies for defect detection, ranking, and mapping for complex geographies and large and aspheric optics.
Accurately measure micro-roughness of surfaces using non-contact optical profilometry
On-Demand Session • 1 Hr 5 Minutes

Qualifying Surface and Device Performance Through Roughness Quantification

Learn how to measure micro-roughness in accordance with the ISO 25178 norm to assess device performance and efficiency and, ultimately, improve product and process design.
Characterization-of-semiconductors-webinar-teaser-BRUKER
On Demand • 2 Hrs

Surface Characterization of Semiconductors: An Overview, from Topography to Advanced Physical Properties

Watch exclusive expert lectures and live demonstrations of Bruker’s high-performance metrology technology and the latest techniques for the nanometer-scale surface characterization of semiconductor materials and devices.