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▶ Watch On-Demand | 35 Minutes
Webinar Recording: Accelerating Process Optimization and Consumable Development for Chemical Mechanical Planarization
See how Tribolab CMP simulates a full-scale CMP process to expedite process and consumable design
Presented by Kora Farokhzadeh, Ph.D., Application Scientist, Bruker (July 13, 2020)
PRESENTATION HIGHLIGHTS:
[00:00:00]
Introduction on CMP
[00:10:06]
Instrumentation and Supply Materials
[00:23:38]
Practical Applications and Experiments
[00:32:56]
Conclusion
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R&D-scale process and material characterization system for wafer polishing processes
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Testing and measurement of friction, wear, and material mechanical properties
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