AFM Modes

Scanning Spreading Resistance Microscopy (SSRM and SSRM-HR)

Wide-range resistance mapping and highest spatial resolution carrier density profiling

Light-emitting diodes (LEDs), photodetectors, and diode lasers are based on semiconductor technology, and their development and fabrication depends upon the ability to measure their electrical properties in two dimensions with high resolution.

Scanning Spreading Resistance Microscopy (SSRM), like Scanning Capacitance Microscopy (SCM), enables simultaneous topographic imaging and 2D carrier density mapping on the surface of semiconductor samples. SSRM employs Contact Mode feedback at high force in conjunction with a wide range amplifier to obtain a measurement of spreading resistance and thus carrier density.

The Dimension Icon® SSRM-HR package achieves highest spatial resolution and repeatability in 2D carrier density mapping, making it the configuration of choice for leading edge semiconductor work.

SSRM channel of ZnO sample. 1.8μm scan size. (Sample courtesy of Prof. A. Waag, TU Braunschweig.)
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Get instant access to the full-length AFM modes handbook.

The Definitive AFM Modes Handbook contains everything you need to understand, select, and apply AFM techniques in materials research, including:

  • An easy-to-use framework for understanding the seven categories of AFM modes, their capabilities, and their core uses
  • Detailed descriptions of 50+ modes and variants (including 300+ data images)
  • Summary information about what each mode is, how it works, and when to use it
  • Our experts' top probe recommendations for each mode
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