AutoMET Software
Bruker’s AutoMET™ software brings high-volume, precise AFM measurements to demanding production environments. Available for Dimension FastScan and Dimension Icon systems, AutoMET uniquely enables the combination of high-resolution AFM imaging with fast, automated metrology. It provides exceptional ease of use and adaptability for critical-to quality measurements in production, QA/QC, or other high-volume measurement applications.
AutoMET enables:
- User-defined automated nanoscale measurements at user-defined locations on data storage slider samples and bare and patterned wafers up to 300 millimeters
- Optical and AFM image pattern recognition, tip-centering, full-wafer or grid-mapping support, and image-placement accuracy within tens of nanometers
- Comprehensive yet simple recipe writing for advanced users
- Easy setup to align sample to probe and to perform alignment corrections
- Run Recipe mode to perform complex measurements on thousands of samples easily using a predefined recipe
AutoMET includes an intuitive and simple recipe-writing environment that makes it extremely easy to reduce complex measurement routines to simple, push-button operations. Operators of all experience levels can obtain detailed, accurate measurements on thousands of samples by running pre-defined recipes.
