SIRIUS-FW
Critical Metrology
for high yield
Sirius-FW
The Sirius-FW is a fourth generation, fully automated µXRF metrology platform that offers specialized single-bump metrology to monitor %Ag in SnAg solder bumps and under bump metalization. Its mature technology boasts a field proven uptime greater than 95%. The Sirius-FW system is capable of measuring single solder bumps as small as 10µm diameter with sub-micron positioning accuracy. Its automated intensity correction (AIC) ensures long-term stability and drift elimination. As would be expected for a production tool, the Sirius-FW is recipe driven and supports full fab automation.
Key Features
- µXRF with vertical excitation - optimized configuration for inline, HVM metrology
- Small spot (<15 µm on AgKα)
- Low sensitivity to Z-errors
- Edge exclusion <0.5 mm
- Non-destructive with low power sealed x-ray W tube
- Polycapillary conditioning optics, polychromatic excitation
- SDD detectors array for efficient photon collection
- Quadrant collection reduces dependence on lateral errors, that is especially important when measure on a dome-shaped solder bumps
- Support of highly bent substrates (up to 2mm bending), glass substrates
Instrumental for High Yield
Sirius-FW applications are instrumental for high yield:
- %Ag in SnAg solder – key to control bumps reflow temperature, needed for regular bump shape and bonding
- Solder bump height, metal thickness of UBM (under bump metallization), back bumps, RDL (redistribution layers) and pillars height: Cu, Ni, Au, Pd Ti – key to cross-wafer planarity needed for good bonding
Benefits
- Single bump metrology for process footprint determination
- GR&R capable metrology on key applications
- Production worthy productivity and MAM (move–acquire-measure) times: seconds for metal thickness, 30-60s for %Ag and bump height
- TOR on major packaging fabs, proven stability and fleet matching
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.