Wavelength Dispersive Spectrometry (WDS) and Energy Dispersive Spectrometry (EDS) are analytical techniques for the sorting and counting of X-rays emitted from a specimen.
The two main limitations of EDS are its low spectral resolution, which does not allow the separation of close energy lines, and its low signal-to-noise ratio, which limits the detection sensitivity. WDS overcomes these limitations by using a crystal to select a single line whose wavelength satisfies Bragg's law. The main disadvantage of WDS is its low collection efficiency which requires high probe currents and/or accelerating voltage, which limits the spatial resolution and can damage fragile materials.
This disadvantage can be countered with the addition of grazing incidence X-ray optics, which makes it possible to increase the collection efficiency, especially for long wavelength radiation. This allows users to reduce the probe current and the accelerating voltage, opening the way to the non-destructive quantitative analysis of nanostructures. For instance, QUANTAX WDS with a grazing incidence optic can be used to study grain boundaries in FeNdB magnets, making it possible to highlight the presence of Co and Cu and to precisely quantify their concentrations.
In this webinar we will explore how the addition of a grazing incidence X-ray optic allows WDS on SEM to be carried out at low accelerating voltages and lower than usual probe currents. This solution allows for analysis to be carried out with the advantages of WDS when compared to SEM EDS, namely an improved resolution and lower signal-to-noise ratio, on sub-micron samples.
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