Advanced Logic
As technological innovations in semiconductor manufacturing reach its limits with Moore’s law, the performance of existing chips can be improved with better understanding of their physical, chemical and electrical properties at the nanoscale.
Advanced Logic
The analytical solutions provided by Bruker enable nanoscale chemical and structural characterization of materials which can be pivotal in designing and optimizing the fabrication process for memory and programmable logic devices.
As logic devices become more complex, introducing such innovations as finFET, nanosheets and other complex structures, metrology needs have increased. Bruker provides a suite of products to enable the development and production ramp of these devices for our key customers, including combined HRXRD and XRR measurements for complex 3D epi and AAFM measurements of nanosheet shape.
