Feature | Benefit |
< 5 meV energy resolution at 30 kV (< 6 meV at 60 kV) | Resolve fine differences in EELS spectral edges |
Large energy range of up to 2 keV at 200 kV | Collect all elements in one EELS spectrum |
Correction of all fifth-order axial aberrations | Larger probe angles, higher beam current |
Every operation can be performed remotely | Remote operation with no local assistance |
Friction-free, centro-symmetric sample stage | Ultra-precise sample motion, freedom from drift |
Double tilt sample holder using ball bearings | Backlash-free, ultra-precise tilting |
Fast electrostatic beam blanker | Avoids sample damage when not collecting data |
5th-order-corrected EELS optics | >50 mr acceptance semi-angles, more efficient analysis |
Microscope column is entirely ion-pumped | Minimizes sample contamination and etching |
Column uses only metal vacuum seals | Sample vacuum typically <1x10-9 torr |
Whole column bakeable to 140°C | Minimizes sensitivity to stray AC fields |
Double μ-metal shielding of entire column | Column can be reconfigured after installation |
Self-diagnosing electronics | Rapid remote servicing |